Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control examines in detail the methodology by which electronic materials and supplies are converted into finished integrated circuits, and electronic products in a high-volume manufacturing environment. Topics covered include: manufacturing and technology overviews, process monitoring, statistical fundamentals, yield modeling, statistical process control, statistical experimental design, process modeling, advanced process control, process and equipment diagnosis, and CIM/CAM systems.