Scaling Issues And Design of Microelectromechanical Systems

The first Micro Electro Mechanical Systems (MEMS) device was presented in 1987, and since then the technology has revolutionised the semiconductor industry by making possible inexpensive integrated electronic circuits comprised of devices and wires with sub-micrometer dimensions.  Micro technology is now commonplace in home appliances, cars and computers. The book has a broad appeal based upon an inter-disciplinary and novel approach. The book`s main idea of using a microrobot as a vehicle for a microsystem scaling study introduces the theoretical and conceptual aspect of this research, as well as the real-world problems that have been encountered. Baglio et al provide a thought provoking yet informative discussion of the scaling of Electronic and Electromechanical Devices, including Micro Electro Mechanical Systems (MEMS) to Nano Electro Mechanical Systems (NEMS), energy sources and power supply strategies and monitoring. Copyright (C) Muze Inc. 2005. For personal use only. All rights reserved.